Characterization and Performance Analysis of BST-Based Ferroelectric Varactors in the Millimeter-Wave Domain

Aurelian Crunteanu (1) , Vincent Muzzupapa (1, 2) , Areski Ghalem (3) , Laure Huitema (2) , Damien Passerieux (3) , Caroline Borderon (4) , Raphaël Renoud (4) , Hartmut Gundel (4)

1 XLIM-RFEI - RF-ELITE : RF-Electronique Imprimée pour les Télécommunications et l'Energie
2 XLIM-SRF - Systèmes RF
3 XLIM - XLIM
4 IETR - Institut d'Électronique et des Technologies du numéRique

We present the realization and analysis of the microwave performances of interdigited varactors integrating thin ferroelectric layers of barium and strontium titanate (Ba_x Sr_(1-x) TiO_3). Devices based on ferroelectric films of different compositions (x = 0.8 and x = 0.5) have been characterized in the millimeter-wave domain, from 200 MHz to 110 GHz. By applying different bias voltages, the tunability of the capacitance can reach up to 40% for the 〖Ba〗_0.8 Sr_0.2 TiO_3 composition, under relatively low applied electric fields of about 167 kV/cm. These promising characteristics allow the integration of the varactor devices in tunable antennas for a large frequency domain, from the microwaves to the millimeter waves range.

Mots clés: ferroelectric thin films; BST; interdigited capacitors

Domaines: Micro et nanotechnologies/Microélectronique; Matériaux

Aurelian Crunteanu, Vincent Muzzupapa, Areski Ghalem, Laure Huitema, Damien Passerieux, et al.. Characterization and Performance Analysis of BST-Based Ferroelectric Varactors in the Millimeter-Wave Domain. Crystals, 2021, 11 (3), pp.277. ⟨10.3390/cryst11030277⟩. ⟨hal-03168081⟩