High temperature difference in a new flexible thermoelectric bismuth telluride microgenerator

G Moiroux (1) , C Tur , Daniel Bourgault (2) , Jean-Luc Garden (3)

1 NEEL- EpiCM - Epitaxie et couches minces
2 NEEL - TPS - Thermodynamique et biophysique des petits systèmes
3 NEEL - Institut Néel

We present new microTEGs based on doped Bi2Te3 thin films deposited on polyimide membrane able to operate under a temperature difference as high as 280 K. We developed two microTEGs with different designs to obtain the lowest internal resistance possible. The thermoelectrical properties coupled to the low contact resistance lead to an open circuit voltage of 64 mV and a maximum output power of 36 µW under a temperature difference of 206 K. Such high temperature difference cannot be obtain in bulk commercial TEG systems; it is maintained without heat sink but only using a copper ring supporting a thin polyimide membrane. These thermoelectric devices deposited on suspended polyimide membranes open new ways for waste heat applications, in particular by direct mechanical and thermal contact with hot sources.

Mots clés: Flexible thermoelectric generator; thermoelectrical thin film; bismuth telluride; dc magnetron sputtering; contact resistance

Domaines: Micro et nanotechnologies/Microélectronique; Physique [physics]

G Moiroux, C Tur, Daniel Bourgault, Jean-Luc Garden. High temperature difference in a new flexible thermoelectric bismuth telluride microgenerator. Sensors and Actuators A: Physical , 2022, 347, pp.113961. ⟨10.1016/j.sna.2022.113961⟩. ⟨hal-03852392⟩