[Invited workshop] Nanorobotic On-Wafer Probe Station Under Scanning Electron Microscope

Kamel Haddadi (1, 2) , Isabelle Roch-Jeune (1, 3)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 CSAM - IEMN - Circuits Systèmes Applications des Micro-ondes - IEMN
3 CMNF - IEMN - Centrale de Micro Nano Fabrication - IEMN

Mots clés: Complex Permittivity of Dielectric Materials; Terahertz Frequencies; S-Parameters; Power; Complex Permittivity; mmWave

Domaines: Sciences de l'ingénieur [physics]

Kamel Haddadi, Isabelle Roch-Jeune. [Invited workshop] Nanorobotic On-Wafer Probe Station Under Scanning Electron Microscope: [Invited Workshop]. 15th European Microwave Week - Workshop Measurements at mmWave and Terahertz Frequencies of Three Measurement Quantities: S-Parameters, Power, and Complex Permittivity of Dielectric Materials, Jan 2021, Utrecht, Netherlands. ⟨hal-03582098⟩