Structuring Lithium Niobate: Collective Etching and FIB Milling for Photonics and Phononics
Résumé
Fabrication processes implemented for the realization of micron-sized patterns in lithium niobate are presented, in view of applications to nanophotonics and phononics. Collective processes based on reactive ion etching in fluorine chemistries as well as FIB milling are discussed.