3D atomic-scale investigation of carbon segregation in phosphorus co-implanted silicon

P. Dumas (1, 2) , Sébastien Duguay (2) , J. Borrel (1) , A. Gauthier (1) , E. Ghegin (1) , D. Blavette (2)

1 ST-CROLLES - STMicroelectronics [Crolles]
2 GPM - Groupe de physique des matériaux

Domaines: Matière Condensée [cond-mat]; Science des matériaux [cond-mat.mtrl-sci]

P. Dumas, Sébastien Duguay, J. Borrel, A. Gauthier, E. Ghegin, et al.. 3D atomic-scale investigation of carbon segregation in phosphorus co-implanted silicon. Applied Physics Letters, 2019, 115 (13), pp.132103. ⟨10.1063/1.5121629⟩. ⟨hal-02298943⟩