Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films

Qianzhe Zhang , David Sánchez-Fuentes (1, 2) , Andrés Gómez (3) , Rudy Desgarceaux (1) , Benoit Charlot (1, 2) , Jaume Gazquez (3) , Adrian Carretero-Genevrier (1, 2) , Marti Gich (3)

1 IES - Institut d’Electronique et des Systèmes
2 M2A - Matériaux, MicroCapteurs et Acoustique
3 ICMAB - Institut de Ciència de Materials de Barcelona

Domaines: Chimie

Qianzhe Zhang, David Sánchez-Fuentes, Andrés Gómez, Rudy Desgarceaux, Benoit Charlot, et al.. Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films. Nanoscale Advances, 2019, 1 (9), pp.3741-3752. ⟨10.1039/C9NA00388F⟩. ⟨hal-02290031⟩