Frequency response of an accelerometer based on thermal convection

Alain Giani (1, 2) , P. Combette (1, 2) , N. Crespy (1) , J. Courteaud (1) , A. Garraud (1) , F. Pascal-Delannoy (1) , Benoit Charlot (1, 2)

1 IES - Institut d’Electronique et des Systèmes
2 M2A - Matériaux, MicroCapteurs et Acoustique

Domaines: Electronique

Alain Giani, P. Combette, N. Crespy, J. Courteaud, A. Garraud, et al.. Frequency response of an accelerometer based on thermal convection. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2009, 2009, Rome, Italy. ⟨hal-02056286⟩