Fabrication of flexible gas sensor based on tin oxide by inkjet printing technology

Omar Kassem (1, 2, 3, 4, 5, 6, 7, 8) , Mohamed Saadaoui (1, 2, 3, 4, 5) , Mathilde Rieu (1, 6, 3, 7, 8, 9) , Jean-Paul Viricelle (1, 6, 3, 7, 8, 9)

1 Mines Saint-Étienne MSE - École des Mines de Saint-Étienne
2 UCA [2017-2020] - Université Clermont Auvergne [2017-2020]
3 CNRS - Centre National de la Recherche Scientifique
4 LIMOS - Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes
5 CMP-ENSMSE - Centre Microélectronique de Provence - Site Georges Charpak (CMP-GC)
6 Université de Lyon
7 LGF-ENSMSE - Laboratoire Georges Friedel
8 SPIN-ENSMSE - Centre Sciences des Processus Industriels et Naturels
9 PTSI-ENSMSE - Département Procédés de Transformations des Solides et Instrumentation

In this work, a flexible tin oxide (SnO₂) gas sensor was successfully fabricated by inkjet printing technology. This thin film deposition technique requires the formulation of stable suspensions with specific fluidic properties. Sol-gel method was applied to synthesize a stable sol based on tin oxide, then transformed into ink with the appropriate rheological properties to be printed using a drop-on-demand piezoelectric inkjet printer. Thermal analysis by TGA/DSC and microstructural analysis by XRD of synthetized sol show that a crystallized structure of SnO₂ could be obtained at 350°C, which is lower than crystallization temperatures of SnO₂ previously reported in the literature, and entirely consistent with our plastic substrate. The printed thin-film was then sintered at 350°C on a flexible plastic (Upilex-50S).

Mots clés: Flexible gas sensor; SnO₂ ink preparation; Inkjet Printing

Domaines: Génie des procédés

Omar Kassem, Mohamed Saadaoui, Mathilde Rieu, Jean-Paul Viricelle. Fabrication of flexible gas sensor based on tin oxide by inkjet printing technology. 17th International Meeting on Chemical Sensors - IMCS 2018, University of Vienna (Austria), Jul 2018, Vienne, Austria. pp.431 à 432 / FE.5, ⟨10.5162/IMCS2018/FE.5⟩. ⟨hal-01998551⟩