Frequency response analysis of an accelerometer based on thermal convection

A Garraud (1) , P. Combette (1, 2) , F. Pichot (1) , J. Courteaud (1) , Benoit Charlot (1, 2) , Alain Giani (1, 2)

1 IES - Institut d’Electronique et des Systèmes
2 M2A - Matériaux, MicroCapteurs et Acoustique

Domaines: Electronique

A Garraud, P. Combette, F. Pichot, J. Courteaud, Benoit Charlot, et al.. Frequency response analysis of an accelerometer based on thermal convection. Journal of Micromechanics and Microengineering, 2011, 21 (3), ⟨10.1088/0960-1317/21/3/035017⟩. ⟨hal-01616141⟩