Electromechanical microsystems with air gaps

Pierre Blondy (1) , Stanis Courrèges (1) , Arnaud Pothier (1) , Jean-Christophe Orlianges (2)

1 XLIM-MINACOM - MINACOM
2 Axe 2 : procédés de traitements de surface

The present invention relates to an microelectromechanical system (1) comprising: a base (15) comprising a substrate (20) and a substrate electrode (40); a moveable beam (30); a voltage generator (10) able to generate a potential difference between the beam (30) and the substrate electrode (40); and at least one mechanical stop (70) connected to the beam and designed to make contact with the base (15) when a potential difference is applied between the beam (30) and the substrate electrode (40), thereby defining an air-filled ...

Mots clés: MEMS - Micro Electro Mechanical System; air gap

Domaines: Micro et nanotechnologies/Microélectronique

Pierre Blondy, Stanis Courrèges, Arnaud Pothier, Jean-Christophe Orlianges. Electromechanical microsystems with air gaps. United States, Patent n° : 8941452. 2015. ⟨hal-01276093⟩