Quantitative analysis of doped/undoped ZnO nanomaterials using laser assisted atom probe tomography: Influence of the analysis parameters

Abstract : In the last decade, atom probe tomography has become a powerful tool to investigate semiconductor and insulator nanomaterials in microelectronics, spintronics, and optoelectronics. In this paper, we report an investigation of zinc oxide nanostructures using atom probe tomography. We observed that the chemical composition of zinc oxide is strongly dependent on the analysis parameters used for atom probe experiments. It was observed that at high laser pulse energies, the electric field at the specimen surface is strongly dependent on the crystallographic directions. This dependence leads to an inhomogeneous field evaporation of the surface atoms, resulting in unreliable measurements. We show that the laser pulse energy has to be well tuned to obtain reliable quantitative chemical composition measurements of undoped and doped ZnO nanomaterials.
Complete list of metadatas

Cited literature [43 references]  Display  Hide  Download

https://hal.archives-ouvertes.fr/hal-01241229
Contributor : Julien Cardin <>
Submitted on : Wednesday, June 27, 2018 - 1:26:47 PM
Last modification on : Monday, May 20, 2019 - 5:42:03 PM
Long-term archiving on : Thursday, September 27, 2018 - 2:24:15 AM

File

Amirifar JAP GPM CIMAP-HAL (1)...
Publisher files allowed on an open archive

Identifiers

Citation

Nooshin Amirifar, Rodrigue Lardé, Etienne Talbot, Philippe Pareige, Lorenzo Rigutti, et al.. Quantitative analysis of doped/undoped ZnO nanomaterials using laser assisted atom probe tomography: Influence of the analysis parameters. Journal of Applied Physics, American Institute of Physics, 2015, 118 (21), pp.215703. ⟨10.1063/1.4936167⟩. ⟨hal-01241229⟩

Share

Metrics

Record views

360

Files downloads

205