Preparation of iron cobaltite thin films by RF magnetron sputtering
Résumé
Iron cobaltite thin films with spinel structure have been elaborated by radio-frequency (RF) magnetron
sputtering from a Co1.75Fe1.25O4 target. Influence of argon pressure on structure, microstructure and physical
properties of films has been examined. Iron–cobalt oxide thin films essentially consist of one spinel phase
when deposited at low pressure (0.5 and 1.0 Pa). At high pressure (2.0 Pa), the global stoichiometry of the film
is changed which results in the precipitation of a mixed monoxide of cobalt and iron beside the spinel phase.
This in-situ reduction due to an oxygen loss occurring mainly at high deposition pressure has been revealed by
X-ray diffraction and Raman spectroscopy. Microstructural evolution of thin film with argon pressure has been
shown by microscopic observations (AFM and SEM). The evolution of magnetic and electrical properties, versus
argon pressure, has been also studied by SQUID and 4 point probe measurements.
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