Timoshenko beam effects in lateral-mode microcantilever-based sensors in liquids

Joshua Schultz (1) , Stephen Heinrich (1) , Fabien Josse (2) , Nicholas Nigro (1) , Isabelle Dufour (3) , Luke Beardslee (4) , Oliver Brand (4)

1 Department of Civil, Construction and Environmental Engineering [Milwaukee]
2 Department of Electrical and Computer Engineering
3 IMS - Laboratoire de l'intégration, du matériau au système
4 ECE GeorgiaTech - School of Electrical and Computer Engineering - Georgia Insitute of Technology

Domains: Micro and nanotechnologies/Microelectronics

Joshua Schultz, Stephen Heinrich, Fabien Josse, Nicholas Nigro, Isabelle Dufour, et al.. Timoshenko beam effects in lateral-mode microcantilever-based sensors in liquids. Micro and Nano Letters, 2013, 8 (11), pp.762-765. ⟨10.1049/mnl.2013.0395⟩. ⟨hal-00867606⟩