Direct visualization and order quantification on self-ordering of diblock copolymers

Mathieu Salaun (1) , M. Le Gallic (1) , E. Picard (2) , M. Zelsmann (1)

1 LTM - Laboratoire des technologies de la microélectronique
2 SiNaps - Silicon Nanoelectronics Photonics and Structures

Domaines: Matériaux

Mathieu Salaun, M. Le Gallic, E. Picard, M. Zelsmann. Direct visualization and order quantification on self-ordering of diblock copolymers. Thin Solid Films, 2013, 543, pp.148-152. ⟨hal-00857614⟩