Vacuum casting of low-cost polymer microstructures for bio-chemical microsystems applications

Matthieu Denoual (1) , S. Prioux (2) , Y. Mace (2) , Pascal Mognol (2) , Bruno Le Pioufle (1)

1 SATIE - Systèmes et Applications des Technologies de l'Information et de l'Energie
2 IRCCyN - Institut de Recherche en Communications et en Cybernétique de Nantes

This paper reports the usage of vacuum casting to perform microscale features down to a few microns with a view to propose a rapid prototyping technique for the bio-microsystem development design flow.

Domaines: Micro et nanotechnologies/Microélectronique

Matthieu Denoual, S. Prioux, Y. Mace, Pascal Mognol, Bruno Le Pioufle. Vacuum casting of low-cost polymer microstructures for bio-chemical microsystems applications. Micro Total Analysis Systems 2004, Vol 2, 2005, Netherlands. pp.357-359. ⟨hal-00795218⟩