HAL will be down for maintenance from Friday, June 10 at 4pm through Monday, June 13 at 9am. More information
Skip to Main content Skip to Navigation
Journal articles

Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement

Document type :
Journal articles
Complete list of metadata

https://hal.archives-ouvertes.fr/hal-00549518
Contributor : Collection Iemn Connect in order to contact the contributor
Submitted on : Wednesday, December 22, 2010 - 10:22:03 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:23 PM

Links full text

Identifiers

Citation

X.Q. Bao, Thomas Dargent, Eric Cattan. Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement. Journal of Micromechanics and Microengineering, IOP Publishing, 2010, 20, pp.025005-1-13. ⟨10.1088/0960-1317/20/2/025005⟩. ⟨hal-00549518⟩

Share

Metrics

Record views

22