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A theoretical and experimental study of the BCB thin-film cap zero-level package based on FEM simulations

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https://hal.archives-ouvertes.fr/hal-00548602
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Submitted on : Monday, December 20, 2010 - 10:01:41 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:23 PM

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S. Seok, N. Rolland, P.A. Rolland. A theoretical and experimental study of the BCB thin-film cap zero-level package based on FEM simulations. Journal of Micromechanics and Microengineering, IOP Publishing, 2010, 20, pp.095010-1-7. ⟨10.1088/0960-1317/20/9/095010⟩. ⟨hal-00548602⟩

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