Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations

J. Dalla Torre , J.L. Bocquet , Y. Limoge , J.P. Crocombette , E. Adam , G. Martin , T. Baron (1) , P. Rivallin , P. Mur

1 LTM - Laboratoire des technologies de la microélectronique

J. Dalla Torre, J.L. Bocquet, Y. Limoge, J.P. Crocombette, E. Adam, et al.. Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations. Journal of Applied Physics, 2002, pp.92, 1084-1094, (2002). ⟨hal-00475872⟩