Grain growth in Damascene interconnects - Archive ouverte HAL Access content directly
Journal Articles Modelling and Simulation in Materials Science and Engineering Year : 2009

Grain growth in Damascene interconnects

No file

Dates and versions

hal-00457466 , version 1 (17-02-2010)

Identifiers

  • HAL Id : hal-00457466 , version 1

Cite

D. Weygand, M. Verdier, J. Lepinoux. Grain growth in Damascene interconnects. Modelling and Simulation in Materials Science and Engineering, 2009, 17 (6). ⟨hal-00457466⟩

Collections

UGA CNRS SIMAP
31 View
0 Download

Share

Gmail Facebook X LinkedIn More