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Conference papers

Mechanical cross-characterization of sputtered Inconel thin films for MEMS applications

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00369948
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Submitted on : Monday, March 23, 2009 - 11:00:19 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:23 PM

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  • HAL Id : hal-00369948, version 1

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G. Fleury, C. Malhaire, C. Populaire, M. Verdier, Arnaud Devos, et al.. Mechanical cross-characterization of sputtered Inconel thin films for MEMS applications. Proceedings of the 2006 European Material Research Society Spring Meeting, 2006, Nice, France. ⟨hal-00369948⟩

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