Stiffness controlled SU8-based nanocomposites : application for 1 GHz matching layer conception

S.X. Wang , Julien Carlier (1, 2) , Assane Ndieguene , Pierre Campistron , Dorothée Debavelaere-Callens , Bertrand Nongaillard (1) , X.Z. Zhao

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN

The photoresist SU-8, often used in microtechnology, has been acoustically characterized at a frequency of 1 GHz thanks to thin-disk piezoelectric ZnO transducers. Acoustical characterization of SU-8-based nanocomposites made of SU-8 and nanosize TiO 2 and/or SrTiO 3 particles is presented. These nanocomposite materials would be used to achieve acoustical matching between silicon and water at a frequency of 1 GHz and of application for the integration of high frequency ultrasonic transducer in Lab-on-Chip for biological cell characterization.

Mots clés: Nanocomposites; Frequency; Resists; Zinc oxide; Acoustic transducers; Piezoelectric transducers; Nanobioscience; Biological materials; Acoustic materials; Silicon

Domaines: Sciences de l'ingénieur [physics]

S.X. Wang, Julien Carlier, Assane Ndieguene, Pierre Campistron, Dorothée Debavelaere-Callens, et al.. Stiffness controlled SU8-based nanocomposites : application for 1 GHz matching layer conception. IEEE International Ultrasonics Symposium, 2008 IEEE IUS, 2008, Beijing, China. pp.678-681, ⟨10.1109/ULTSYM.2008.0163⟩. ⟨hal-00361159⟩