Characterization of LiTaO3 thin films fabricated by sol–gel technique

S. Youssef , R. Al Asmar , J. Podlecki (1, 2) , F. Pascal-Delannoy (1) , Y. Zaatar , A. Foucaran (1, 3)

1 IES - Institut d’Electronique et des Systèmes
2 M2A - Matériaux, MicroCapteurs et Acoustique
3 M@CSEE - Micro électronique, Composants, Systèmes, Efficacité Energétique

Lithium tantalite (LiTaO3) thin films have been fabricated by sol–gel technique and crystallized by RTA process. The effect of heating temperature on the structural properties of LiTaO3 is investigated. The thin films are characterized by means of X-ray diffraction, Raman spectroscopy and thermal analysis (DCA/DTA). After the optimization of the growth parameters of LiTaO3 prepared by sol–gel processing, the pyroelectric property of LiTaO3 thin films deposited on Si (1 0 0) substrates have been also investigated.

Mots clés: Lithium tantalite; Sol–gel; Structural properties; Optical measurements; Thermal analysis; Pyroelectric property

Domaines: Electronique

S. Youssef, R. Al Asmar, J. Podlecki, F. Pascal-Delannoy, Y. Zaatar, et al.. Characterization of LiTaO3 thin films fabricated by sol–gel technique. Microelectronics Journal, 2007, 38 (1), pp.63-66. ⟨10.1016/j.mejo.2006.09.010⟩. ⟨hal-00328100⟩