Manufacturing method for microthermocouple sensor for a mass flow meter and associated device
Résumé
A micro-thermocouple (7) is produced by depositing the thermocouple elements (21-23) on an insulation coated capillary tube (6) and, after annealing, fitting a heating element (20) on the tube (6). Independent claims are also included for heating elements for the above sensor, comprising (i) a coil of 75% Ni/25% Cr alloy wire of a few tens of microns diameter; (ii) CMS resistors (18, 19) cast on a copper sleeve (17); (iii) one of the thermocouple materials, the heating being achieved by alternating Joule effect heating; and (iv) a heating element formed by deposition on the capillary tube (6).