X-ray diffraction studies of electrostatic sprayed SnO2:F films

D. Zaouk , R. Al Asmar , J. Podlecki (1, 2) , Y. Zaatar , A. Khoury , A. Foucaran (1, 2)

1 IES - Institut d’Electronique et des Systèmes
2 M@CSEE - Micro électronique, Composants, Systèmes, Efficacité Energétique

Fluorine-doped tin oxide films were deposited by electrostatic spray pyrolysis technique (ESP), on 1cmx1cm Corning 7059 substrates. The structural and electrical properties of the deposited films with different doping levels are studied. Relative variations in the structural properties were explained on the basis of structural factor calculations. The results show that the incorporation of fluorine atoms took place only at substitutional sites leading to an increase in free carrier concentration

Domaines: Electronique

D. Zaouk, R. Al Asmar, J. Podlecki, Y. Zaatar, A. Khoury, et al.. X-ray diffraction studies of electrostatic sprayed SnO2:F films. Microelectronics Journal, 2007, 38 (8-9), pp.884-887. ⟨10.1016/j.mejo.2007.07.072⟩. ⟨hal-00327626⟩