Pyroelectric LiTaO3 thin films elaborated by RF magnetron sputtering with Li enriched target of Li2O2/Ta2O5

L. Nougaret (1) , P. Combette (1, 2) , F. Pascal-Delannoy (1)

1 IES - Institut d’Electronique et des Systèmes
2 M2A - Matériaux, MicroCapteurs et Acoustique

LiTaO3 thin films were deposited by RF magnetron sputtering with a Li enriched target composed of Li2O2/Ta2O5 (55: 45 at %). LiTaO3 pyroelectric characteristics were studied with various gas compositions and with different bottom electrodes (RuO2 or Ru/RuO2). It can be seen that the LiTaO3 pyroelectric coefficient increases when the oxygen percentage decreases. Similar tests versus the back electrodes show the effect on pyroelectric properties of interface between LiTaO3 film and the bottom electrode. Ageing of pyroelectric coefficient are also presented and discussed. Finally, these results are compared with the pyroelectric coefficient values obtained with a stoichiometric target of Li2O2/Ta2O5

Domaines: Electronique

L. Nougaret, P. Combette, F. Pascal-Delannoy. Pyroelectric LiTaO3 thin films elaborated by RF magnetron sputtering with Li enriched target of Li2O2/Ta2O5. Integrated Ferroelectrics, 2007, 95 (1), pp.44-53. ⟨10.1080/10584580701756458⟩. ⟨hal-00327287⟩