Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates : a comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques

M. Pokorny; M. Sulc; R. Herdier; Denis Remiens; El Hadj Dogheche; D. Jenkins

doi:10.1080/00150190701354109

Journal articles

Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates : a comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques

M. Pokorny M. Sulc R. Herdier Denis Remiens ¹ El Hadj Dogheche D. Jenkins

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520

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Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates : a comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques

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Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates : a comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques

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