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Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates : a comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques

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https://hal.archives-ouvertes.fr/hal-00285656
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Submitted on : Friday, June 6, 2008 - 9:17:13 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:22 PM

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M. Pokorny, M. Sulc, R. Herdier, Denis Remiens, El Hadj Dogheche, et al.. Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates : a comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques. Ferroelectrics, Taylor & Francis: STM, Behavioural Science and Public Health Titles, 2007, 351, pp.122-130. ⟨10.1080/00150190701354109⟩. ⟨hal-00285656⟩

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