Microcantilever: a chemical resonant sensor
Résumé
Silicon micromachined cantilevers can be used as chemical resonant sensor by adding a sensitive layer on the device structure. In this paper, the process technology, based on the use of SOI wafer, and the sensitive layer deposition are described. Using four different geometrical microcantilevers, the frequency dependence to mass modification is measured and allows to predict gas sensor response.
Origine : Fichiers produits par l'(les) auteur(s)
Loading...