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Depth dependence of defect evolution and TED during annealing

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https://hal.archives-ouvertes.fr/hal-00140976
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Submitted on : Wednesday, April 11, 2007 - 10:30:57 AM
Last modification on : Saturday, October 9, 2021 - 3:18:32 AM

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  • HAL Id : hal-00140976, version 1

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B. Colombeau, N.E.B. Cowern, Fuccio Cristiano, P. Calvo, Y. Lamrani, et al.. Depth dependence of defect evolution and TED during annealing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2004, 216, pp.90-94. ⟨hal-00140976⟩

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