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Conference papers

Design of silicon-pTMDS bioMEMS by cold RPECVD

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https://hal.archives-ouvertes.fr/hal-00140776
Contributor : Collection Iemn Connect in order to contact the contributor
Submitted on : Tuesday, April 10, 2007 - 10:41:59 AM
Last modification on : Tuesday, October 19, 2021 - 6:37:49 PM

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  • HAL Id : hal-00140776, version 1

Citation

B. Bocquet, N.E. Bourzgui, Y. Guhel, V. Mille. Design of silicon-pTMDS bioMEMS by cold RPECVD. 2004, pp.118-129. ⟨hal-00140776⟩

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