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Non-linear piezoelectric properties of the thin Pb(ZrxTi1−x)O3 (PZT) films deposited on the Si-substrate

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https://hal.archives-ouvertes.fr/hal-00138430
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Submitted on : Monday, March 26, 2007 - 11:41:26 AM
Last modification on : Tuesday, October 19, 2021 - 6:37:48 PM

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  • HAL Id : hal-00138430, version 1

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J. Nosek, M. Sulc, L. Burianova, Caroline Soyer, Eric Cattan, et al.. Non-linear piezoelectric properties of the thin Pb(ZrxTi1−x)O3 (PZT) films deposited on the Si-substrate. Journal of the European Ceramic Society, Elsevier, 2005, 25, pp.2257-2261. ⟨hal-00138430⟩

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