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Conference papers

Determination by indentation method of sputtered PZT films mechanical parameters for Si-MEMs applications

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00138429
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Submitted on : Monday, March 26, 2007 - 11:41:24 AM
Last modification on : Tuesday, October 19, 2021 - 6:37:48 PM

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  • HAL Id : hal-00138429, version 1

Citation

P. Delobelle, E. Fribourg-Blanc, O. Guillon, Caroline Soyer, Eric Cattan, et al.. Determination by indentation method of sputtered PZT films mechanical parameters for Si-MEMs applications. 2005, pp.213-221. ⟨hal-00138429⟩

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