Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator

Vincent Agache (1) , Bernard Legrand (1) , Dominique Collard (1) , Lionel Buchaillot (1) , Hiroyuki Fujita (2)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 Inst Ind Sci, CIRMM

An electromechanical resonator based on a blade geometry is proposed in this letter. This particular geometry allows self-alignment of the mechanical resonator structure to its lateral electrodes while achieving high eigenfrequencies in the GHz range. This letter reports both the fabrication process of the device and measurements in order to extract its mechanical response according to a lateral flexural solicitation. A mixing setup characterization is performed in order to suppress direct capacitive coupling feedthrough from the output current measurement and enable the effective quality factor extraction. This work was supported by the European Union under Contract No. IST-1999-10945. The authors would like to thank S. Lepillet and D. Ducatteau for their valuable help during the devices characterization, and in the same way the IEMN Process Team, for their assistance in the fabrication process.

Domaines: Sciences de l'ingénieur [physics]

Vincent Agache, Bernard Legrand, Dominique Collard, Lionel Buchaillot, Hiroyuki Fujita. Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator. Applied Physics Letters, 2005, 86, pp.213104-1-3. ⟨10.1063/1.1929873⟩. ⟨hal-00125633⟩