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Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator

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https://hal.archives-ouvertes.fr/hal-00125633
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Submitted on : Monday, January 22, 2007 - 10:27:53 AM
Last modification on : Tuesday, October 19, 2021 - 6:37:47 PM

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  • HAL Id : hal-00125633, version 1

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V. Agache, Bernard Legrand, D. Collard, L. Buchaillot, H. Fujita. Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator. Applied Physics Letters, American Institute of Physics, 2005, 86, pp.213104-1-3. ⟨hal-00125633⟩

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