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Determination by indentation method of sputtered PZT films mechanical parameters for Si-MEMS applications

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https://hal.archives-ouvertes.fr/hal-00020029
Contributor : Christine Froidevaux Connect in order to contact the contributor
Submitted on : Friday, March 3, 2006 - 2:10:15 PM
Last modification on : Tuesday, October 19, 2021 - 6:38:22 PM

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  • HAL Id : hal-00020029, version 1

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Patrick Delobelle, Olivier Guillon, E. Fribourg-Blanc, Caroline Soyer, Denis Remiens, et al.. Determination by indentation method of sputtered PZT films mechanical parameters for Si-MEMS applications. 2004. ⟨hal-00020029⟩

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