Design and fabrication of piezoelectric micro power generators for autonomous microsystems

Skandar Basrour (1) , B. Charlot (1) , M. Marzencki (1) , A. Grasso (1) , Mikaël Colin (2) , L. Valbin (3)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés
2 MEMSCAP - Central R&D Memscap
3 ESIEE Paris

This paper presents a design and fabrication of piezoelectric micro power generators intended to be a power source for autonomous microsystems. Modelling and simulation of such structures are presented. A power output of 60nW for AIN and 600nW for PZT, resulting from Finite Element Method simulations is reported. Fabrication process involving deposition of AIN layers is presented and detailed.

Keywords: MEMS

Domains: Micro and nanotechnologies/Microelectronics

Skandar Basrour, B. Charlot, M. Marzencki, A. Grasso, Mikaël Colin, et al.. Design and fabrication of piezoelectric micro power generators for autonomous microsystems. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP'05), June 1-3, 2005, Montreux, Switzerland. pp.299-302. ⟨hal-00009215⟩