Boron doping of silicon by excimer laser irradiation in a reactive atmosphere. The incorporation mechanism - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Applied physics. A, Materials science & processing Année : 1990

Boron doping of silicon by excimer laser irradiation in a reactive atmosphere. The incorporation mechanism

Fichier non déposé

Dates et versions

in2p3-00016162 , version 1 (29-06-2000)

Identifiants

  • HAL Id : in2p3-00016162 , version 1

Citer

A. Slaoui, F. Foulon, R. Stuck, P. Siffert. Boron doping of silicon by excimer laser irradiation in a reactive atmosphere. The incorporation mechanism. Applied physics. A, Materials science & processing, 1990, 50, pp.479. ⟨in2p3-00016162⟩
8 Consultations
0 Téléchargements

Partager

Gmail Facebook X LinkedIn More