Sol-gel TiO 2 nanoimprinted metasurface combined to hybrid-silica sensitive layers for selective VOC detection with high refractive index sensitivity

Mehrnaz Modaresialam (1) , Gabrielle Bordelet (1) , Zeinab Chehadi (1) , Martin O'Byrnen (1) , Luc Favre (1) , Magali Putero (1) , Marco Abbarchi (1) , David Grosso (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

TOC VOC detection at sub-ppm levels, associated to a high RI variation sensitivity, was achieved by direct reflection on a surface composed of sol-gel organic-inorganic microporous sensitive layers embedding an array of 140 nm TiO2 pillar antennas prepared by sol-gel nanoimprint. Such a performance was attributed to the electromagnetic confinement within the Titania pillars, enhancing the interaction of the radiation with the sensitive media. The system also shows a relatively good selectivity by comparing the adsorption of five different VOCs with various polarity indexes within six different sensitive sol-gel layers.

Domaines: Chimie

Mehrnaz Modaresialam, Gabrielle Bordelet, Zeinab Chehadi, Martin O'Byrnen, Luc Favre, et al.. Sol-gel TiO 2 nanoimprinted metasurface combined to hybrid-silica sensitive layers for selective VOC detection with high refractive index sensitivity. ACS Applied Materials & Interfaces, 2021. ⟨hal-03602840⟩