Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target

R. Graillot-Vuillecot (1) , A.-L. Thomann (1) , T. Lecas (1) , C. Cachoncinlle (1) , E. Millon (1) , A. Caillard (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Domaines: Science des matériaux [cond-mat.mtrl-sci]

R. Graillot-Vuillecot, A.-L. Thomann, T. Lecas, C. Cachoncinlle, E. Millon, et al.. Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target. Vacuum, 2022, 197, pp.110813. ⟨10.1016/j.vacuum.2021.110813⟩. ⟨hal-03541208⟩