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Short-Pulse Laser-Assisted Fabrication of a Si-SiO2 Microcooling Device

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https://hal.archives-ouvertes.fr/hal-03356892
Contributor : Alexandros Mouskeftaras Connect in order to contact the contributor
Submitted on : Tuesday, September 28, 2021 - 2:54:30 PM
Last modification on : Friday, April 1, 2022 - 3:57:56 AM
Long-term archiving on: : Wednesday, December 29, 2021 - 6:40:42 PM

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micromachines-12-01054-v3.pdf
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Alexandros Mouskeftaras, Stephan Beurthey, Julien Cogan, Gregory Hallewell, Olivier Leroy, et al.. Short-Pulse Laser-Assisted Fabrication of a Si-SiO2 Microcooling Device. Micromachines, MDPI, 2021, 12 (9), pp.1054. ⟨10.3390/mi12091054⟩. ⟨hal-03356892⟩

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