Three-dimensional luminescence microscopy for quantitative plasma characterization in bulk semiconductors

A Wang (1) , A Das (1) , J Hermann (1) , D Grojo (1)

1 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques

Mots clés: WAVE-GUIDES, LASER, SILICON, DELOCALIZATION, RECOMBINATION, INSCRIPTION, ABSORPTION, RADIATION

Domaines: Optique [physics.optics]

A Wang, A Das, J Hermann, D Grojo. Three-dimensional luminescence microscopy for quantitative plasma characterization in bulk semiconductors. Applied Physics Letters, 2021, 119 (4), pp.041108. ⟨10.1063/5.0059431⟩. ⟨hal-03350812⟩