Scalable Disordered Hyperuniform Architectures via Nanoimprint Lithography of Metal Oxides

Zeinab Chehadi (1) , Mohammed Bouabdellaoui (1) , Mehrnaz Modaresialam (1) , Thomas Bottein (1) , Marco Salvalaglio (2) , Monica Bollani (3) , David Grosso (1) , Marco Abbarchi (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 Institute of Scientific Computing, Department of Mathematics
3 Istituto di Fotonica e Nanotecnologie-Consiglio Nazionale delle Ricerche,Laboratory for Nanostructure Epitaxy and Spintronics on Silicon, Via Anzani 42, 22100 Como, Italy.

Fabrication and scaling of disordered hyperuniform materials remain hampered by the difficulties in controlling the spontaneous phenomena leading to this novel kind of exotic arrangement of objects. Here, we demonstrate a hybrid top-down/ bottom-up approach based on sol−gel dip-coating and nanoimprint lithography for the faithful reproduction of disordered hyperuniform metasurfaces in metal oxides. Nano-to microstructures made of silica and titania can be directly printed over several cm 2 on glass and on silicon substrates. First, we describe the polymer mold fabrication starting from a hard master obtained via spontaneous solid-state dewetting of SiGe and Ge thin layers on SiO 2. Then, we assess the effective disordered hyperuniform character of master and replica and the role of the thickness of the sol− gel layer on the metal oxide replicas and on the presence of a residual layer underneath. Finally, as a potential application, we show the antireflective character of titania structures on silicon. Our results are relevant for the realistic implementation over large scales of disordered hyperuniform nano-and microarchitectures made of metal oxides, thus opening their exploitation in the framework of wet chemical assembly.

Mots clés: Metrics & More Article Recommendations disordered hyperuniform materials; sol−gel dip-coating; nanoimprint lithography; titania; silica; Metrics & More Article Recommendations disordered hyperuniform materials; Disordered hyperuniform materials; Sol-gel dip coating; Nano-imprint lithography; silica. 2

Domaines: Matériaux; Optique [physics.optics]; Physique [physics]

Zeinab Chehadi, Mohammed Bouabdellaoui, Mehrnaz Modaresialam, Thomas Bottein, Marco Salvalaglio, et al.. Scalable Disordered Hyperuniform Architectures via Nanoimprint Lithography of Metal Oxides. ACS Applied Materials & Interfaces, 2021, 13 (31), pp.37761-37774. ⟨10.1021/acsami.1c05779⟩. ⟨hal-03328593⟩