Setting parameters influence on accuracy and stability of near-field scanning microwave microscopy platform

Sijia Gu (1) , Kamel Haddadi (1, 2) , Abdelhatif El Fellahi (1, 3) , Tuami Lasri (1, 4)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 CSAM - IEMN - Circuits Systèmes Applications des Micro-ondes - IEMN
3 SATIE-SIAME - Systèmes d'Information et d'Analyse Multi-Echelles
4 MITEC - IEMN - Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN

In this paper, the impact of different setting parameters on the performance of a microwave microscope is evaluated. This study is performed on a homemade near-field scanning microwave microscope built up with a conventional vector network analyzer and a vertical coaxial evanescent probe. A broadband matching network based on an interferometric technique is inserted between the analyzer and the probe to enhance the measurement sensitivity/accuracy in the frequency range 2-20 GHz. The performance of the system in terms of measurement accuracy and stability is derived as a function of different setting parameters. Microwave surface imaging of subwavelength features is evaluated as a demonstration. This paper provides a guide for best practice in microwave microscopy.

Domaines: Sciences de l'ingénieur [physics]

Sijia Gu, Kamel Haddadi, Abdelhatif El Fellahi, Tuami Lasri. Setting parameters influence on accuracy and stability of near-field scanning microwave microscopy platform. IEEE Transactions on Instrumentation and Measurement, 2016, 65 (4), pp.890-897. ⟨10.1109/TIM.2015.2507699⟩. ⟨hal-03224657⟩