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Micro-force sensor by active control of a comb-drive

Abstract : This article describes an active force sensor with an accuracy of 0.4 μN over a large range [-400 to 400] μN. The mechanical structure, through a fiber suspension arrangement, provides exactly one degree of freedom. This design allows for a precise displacement sensing by a laser optical lever. The force sensing principle is based on the active control of an electrostatic bi-polar actuator. A meso-scale prototype has been built as proof-of-concept and an especially designed controller allows for high precision measurements on a large range. The system is validated by measuring both pull-in and pull-off forces during an approach-retract cycle on water droplet. Both phenomena, although differing by an order of magnitude in amplitude, are correctly assessed.
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https://hal.archives-ouvertes.fr/hal-03190975
Contributor : Sinan Haliyo Connect in order to contact the contributor
Submitted on : Tuesday, April 6, 2021 - 6:26:30 PM
Last modification on : Tuesday, November 16, 2021 - 5:25:31 AM

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Abdenbi Mohand Ousaid, Sinan Haliyo, Stephane Regnier, Vincent Hayward. Micro-force sensor by active control of a comb-drive. IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), 2013, Wollongong, Australia. pp.612-617, ⟨10.1109/AIM.2013.6584160⟩. ⟨hal-03190975⟩

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