A Study on the Strain Distribution by Scanning X-ray diffraction on GaP/Si for III-V Monolithic Integration on Silicon for Nonlinear Optics

Ang Zhou (1) , Yanping Wang (1) , Charles Cornet (1) , Yoan Léger (1) , Laurent Pedesseau (1) , Olivier Durand (1) , Vincent Favre-Nicolin (2) , Gilbert André Chahine (3) , Tobias Schulli (2) , Joel Eymery (4) , Mounib Bahri (5) , Gilles Patriarche (5) , Ludovic Largeau (5) , Antoine Létoublon (1)

1 FOTON - Institut des Fonctions Optiques pour les Technologies de l'informatiON
2 ESRF - European Synchrotron Radiation Facility
3 SIMaP - Science et Ingénierie des Matériaux et Procédés
4 NRS - Nanostructures et Rayonnement Synchrotron
5 C2N - Centre de Nanosciences et de Nanotechnologies

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Ang Zhou, Yanping Wang, Charles Cornet, Yoan Léger, Laurent Pedesseau, et al.. A Study on the Strain Distribution by Scanning X-ray diffraction on GaP/Si for III-V Monolithic Integration on Silicon for Nonlinear Optics. Rayons X et Matière 2019, Nov 2019, Nancy, France. ⟨hal-03108397⟩