Edge mode engineering for optimal ultracoherent silicon nitride membranes

E Ivanov (1) , T Capelle (1) , M Rosticher (2) , J Palomo (2) , T Briant (1) , P-F Cohadon (1) , A Heidmann (1) , T Jacqmin (1) , S Deléglise (1)

1 LKB (Jussieu) - Laboratoire Kastler Brossel
2 LPENS - Laboratoire de physique de l'ENS - ENS Paris

Due to their high force sensitivity, mechanical resonators combining low mechanical dissipation with a small motional mass are highly demanded in fields as diverse as resonant force microscopy, mass sensing, or cavity optomechanics. "Soft-clamping" is a phononic engineering technique by which mechanical modes of highly-stressed membranes or strings are localized away from lossy regions, thereby enabling ultrahigh-Q for ng-scale devices. Here, we report on parasitic modes arising from the finite size of the structure which can significantly degrade the performance of these membranes. Through

Domaines: Physique Quantique [quant-ph]

E Ivanov, T Capelle, M Rosticher, J Palomo, T Briant, et al.. Edge mode engineering for optimal ultracoherent silicon nitride membranes. Applied Physics Letters, 2020, 117, ⟨10.1063/5.0031626⟩. ⟨hal-03085938⟩