A kinetic model for stress generation in thin films grown from energetic vapor fluxes

E. Chason , M. Karlson (1) , J. Colin (2) , D. Magnfält (3) , K. Sarakinos (4) , Gregory Abadias (5)

1 Department of Engineering Sciences
2 Département PMM - Département Physique et Mécanique des Matériaux [Institut Pprime]
3 The Plasma and Coatings Physics group
4 The Plasma & Coatings Physics group
5 PPNa - Physique et Propriétés des Nanostructures [Institut Pprime]

Domaines: Matière Condensée [cond-mat]

E. Chason, M. Karlson, J. Colin, D. Magnfält, K. Sarakinos, et al.. A kinetic model for stress generation in thin films grown from energetic vapor fluxes. Journal of Applied Physics, 2016, 119 (14), pp.145307. ⟨10.1063/1.4946039⟩. ⟨hal-03036817⟩