Internal Structuring of Silicon using THz-Repetition-Rate Trains of Ultrashort Pulses

A. Wang (1) , A. Das (1) , D. Grojo (1)

1 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques

We generate and apply trains of infrared femtosecond pulses at the highest achievable repetition-rates. This gives unique multi-timescale control parameters used for improved energy deposition and reliable 3D laser writing deep inside silicon.

Domaines: Optique [physics.optics]; Physique [physics]; Sciences de l'ingénieur [physics]

A. Wang, A. Das, D. Grojo. Internal Structuring of Silicon using THz-Repetition-Rate Trains of Ultrashort Pulses. OSA Technical Digest (Optical Society of America), 2020, pp.ATu3K.4. ⟨10.1364/CLEO_AT.2020.ATu3K.4⟩. ⟨hal-02990021⟩