Thermally induced evolution of the structure and optical properties of silicon nanowires

Gauhar Mussabek (1, 2, 3) , Vladimir Lysenko (2, 4) , Dana Yermukhamed (1) , Vladimir Sivakov (5) , Victor Yu. Timoshenko (2, 6, 7)

1 KazNU - Al-Farabi Kazakh National University [Almaty]
2 The National Research Nuclear University MEPhI (Moscow Engineering Physics Institute) [Moscow, Russia]
3 IICT - Institute of Information and Computational Technologies
4 iLM - FENNEC - iLM - Formation, élaboration de nanomatériaux et cristaux
5 Leibniz IPHT - Leibniz Institute of Photonic Technology
6 MSU - Lomonosov Moscow State University
7 LPI RAS - P. N. Lebedev Physical Institute of the Russian Academy of Sciences [Moscow]

In the present paper, we report on the investigation of thermal annealing (TA) effect on structural and optical properties of crystalline silicon nanowires produced by metal-assisted chemical etching approach. In particular, the impact of TA on nanowire length, relative volume and size distribution of voids is described in terms of Lifshitz-Slyozov-Wagner theory considering the TA induced Oswald ripening in the SiNW arrays. It was also found that TA leads to a decrease of the SiNWs total reflection in the wide UV–VIS-IR spectral range. The reported effects can be used for tuning of crystalline SiNWs arrays in view of their further applications in photonics related fields.

Mots clés: Metal assisted etching; Nanowires; Silicon; Ostwald ripening; Thermal annealing

Domaines: Sciences de l'ingénieur [physics]; Chimie; Physique [physics]; Science des matériaux [cond-mat.mtrl-sci]

Gauhar Mussabek, Vladimir Lysenko, Dana Yermukhamed, Vladimir Sivakov, Victor Yu. Timoshenko. Thermally induced evolution of the structure and optical properties of silicon nanowires. Results in Physics, 2020, 18, pp.103258. ⟨10.1016/j.rinp.2020.103258⟩. ⟨hal-02920082⟩