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Modeling and experimental characterization of an active MEMS-based force sensor

Abstract : Active force sensors are based on the principle of force balancing using a feedback control. They allow, unlike passive sensors, the measurement of forces in a wide range with nanoNewton resolutions. This capability is fundamental when dealing with the mechanical characterization of samples with a wide range of stiffness. This paper deals with the modeling and the experimental characterization of a new active MEMS based force sensor. This sensor includes folded-flexure type suspensions and a differential comb drive actuation allowing a linear force/voltage relationship. A control oriented electromechanical model is proposed and validated experimentally in static and dynamic operating modes using a stroboscopic measurement system. The sensor has a resonant frequency of 2.2 kHz, and a static passive measurement range of ±2.45 µN. This work is the first step toward new dynamic measuring capabilities and sensing at the micro/nano-scales when high dynamic, large measurement range and nanoNewton resolution are required
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Submitted on : Monday, June 15, 2020 - 1:29:24 PM
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  • HAL Id : hal-02868168, version 1


Jonathan Cailliez, Mokrane Boudaoud, Abdenbi Mohand Ousaid, Antoine Duflos, Sinan Haliyo, et al.. Modeling and experimental characterization of an active MEMS-based force sensor. International Conference on Manipulation, Automation and Robotics at Small Scales, Jul 2018, Nagoya, Japan. ⟨hal-02868168⟩



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