Structural characteristics and performances of rf-sputtered Mo/Si and Co/Si multilayers for soft x-ray optics

Pierre Boher (1) , Philippe Houdy (1) , Louis Hennet (1) , Mikhael Kuehne , Peter Mueller , J. Frontier (2) , P. Trouslard (2) , C. Senillou (3) , J. Joud (3) , P. Ruterana (4)

1 LEP - Laboratoire d'électronique de Philips
2 INSTN - Institut National des Sciences et Techniques Nucléaires
3 LTPCM - Laboratoire de thermodynamique et physico-chimie métallurgiques
4 Swiss Federal Institute of Technology

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Pierre Boher, Philippe Houdy, Louis Hennet, Mikhael Kuehne, Peter Mueller, et al.. Structural characteristics and performances of rf-sputtered Mo/Si and Co/Si multilayers for soft x-ray optics. San Diego, '91, San Diego, CA, 1991, San Diego, United States. pp.21-38, ⟨10.1117/12.51267⟩. ⟨hal-02540623⟩